IEEE - Institute of Electrical and Electronics Engineers, Inc. - On-Line Rescheduling for Semiconductor Manufacturing

2006 IEEE International Conference on Automation Science and Engineering

Author(s): Han-Pang Huang ; Tien-Ying Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Shanghai, China
Conference Date: 8 October 2006
Page(s): 106 - 111
ISBN (CD): 1-4244-0311-1
ISBN (Paper): 1-4244-0310-3
DOI: 10.1109/COASE.2006.326863
Regular:

Semiconductor wafer fabrication involves one of the most complex manufacturing processes ever used. To control such complex systems, it is a challenge to determine appropriate dispatching... View More

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