IEEE - Institute of Electrical and Electronics Engineers, Inc. - A fast rescheduling method in semiconductor manufacturing allowing for tardiness and scheduling stability

2006 IEEE International Conference on Automation Science and Engineering

Author(s): Mingang Cheng ; M. Sugi ; J. Ota ; M. Yamamoto ; H. Ito ; K. Inoue
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Shanghai, China
Conference Date: 8 October 2006
Page(s): 100 - 105
ISBN (CD): 1-4244-0311-1
ISBN (Paper): 1-4244-0310-3
DOI: 10.1109/COASE.2006.326862
Regular:

In semiconductor manufacturing, rescheduling problems are extremely difficult to solve in real time due to the high frequency of disturbances that occur approximately every minute. This paper... View More

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