IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of Pressure Sensitive Molecular Film as a Measurement Technique for Micro-and Nano-devices

2006 IEEE International Symposium on Micro-NanoMechatronics and Human Science

Author(s): H. Mori ; Y. Matsuda ; T. Niimi ; H. Uenishi ; Y. Sakazaki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Conference Location: Nagoya, Japan
Conference Date: 5 November 2006
Page(s): 1 - 6
ISBN (CD): 1-4244-0718-1
ISBN (Paper): 1-4244-0717-6
DOI: 10.1109/MHS.2006.320288
Regular:

Gas flows in micro- and nano-systems having high Knudsen number must be treated as molecular flows, and experimental analyses of thermo-fluid phenomena in micro- and nano-systems need measurement... View More

Advertisement