IEEE - Institute of Electrical and Electronics Engineers, Inc. - Mechanical Properties of Mono-crystalline Silicon Thin Films Measured by Different Methods

2006 IEEE International Symposium on Micro-NanoMechatronics and Human Science

Author(s): Xueping Li ; Guifu Ding ; T. Ando ; M. Shikida ; K. Sato
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Conference Location: Nagoya, Japan
Conference Date: 5 November 2006
Page(s): 1 - 6
ISBN (CD): 1-4244-0718-1
ISBN (Paper): 1-4244-0717-6
DOI: 10.1109/MHS.2006.320287
Regular:

In order to investigate the reliability of the mechanical properties of mono-crystalline silicon thin films (thickness of 5 mum), a uniaxial tensile test and a nanoindentation test were conducted,... View More

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