IEEE - Institute of Electrical and Electronics Engineers, Inc. - Local Growth of Carbon Nanotubes with a Simple Mask CVD Method on 3-D substrates

2006 IEEE International Symposium on Micro-NanoMechatronics and Human Science

Author(s): Y. Imaizumi ; Y. Arakawa ; T. Fukuda
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Conference Location: Nagoya, Japan
Conference Date: 5 November 2006
Page(s): 1 - 6
ISBN (CD): 1-4244-0718-1
ISBN (Paper): 1-4244-0717-6
DOI: 10.1109/MHS.2006.320240
Regular:

Carbon nanotubes (CNTs) are potentially useful for developing functional nanodevices such as thermal probes, flow sensor arrays, and AFM probes. Controlling the growth position of CNTs grown by... View More

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