IEEE - Institute of Electrical and Electronics Engineers, Inc. - In-situ Fabrication of Micro Pillars on Paraffin Substrate Using Laser Heating

2006 IEEE International Symposium on Micro-NanoMechatronics and Human Science

Author(s): Chu-An Lee ; N. Tsukada ; T. Higuchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Conference Location: Nagoya, Japan
Conference Date: 5 November 2006
Page(s): 1 - 6
ISBN (CD): 1-4244-0718-1
ISBN (Paper): 1-4244-0717-6
DOI: 10.1109/MHS.2006.320324
Regular:

In this paper, a fabrication method to form micro pillars with a high aspect ratio (more than 20) from a paraffin substrate is described. This technique makes use of an interesting phenomenon that... View More

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