IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultraprecision Micro-Machining of Single Crystal Germanium by Applying Elliptical Vibratlon Cutting

2006 IEEE International Symposium on Micro-NanoMechatronics and Human Science

Author(s): N. Suzuki ; Z. Yan ; R. Hino ; E. Shamoto ; Y. Hirahara ; T. Masuda
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Conference Location: Nagoya, Japan
Conference Date: 5 November 2006
Page(s): 1 - 6
ISBN (CD): 1-4244-0718-1
ISBN (Paper): 1-4244-0717-6
DOI: 10.1109/MHS.2006.320323
Regular:

'Ultrasonic elliptical vibration cutting' technology, which has been developed by the authors, is applied to ultraprecision machining of single crystal germanium in the present research. The... View More

Advertisement