IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Simulation of an Integrated Metal Oxide Based Micro NO2 Gas Sensor

2006 IEEE International Symposium on Micro-NanoMechatronics and Human Science

Author(s): Ling-Han Li ; Dzung Viet Dao ; S. Sugiyama
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Conference Location: Nagoya, Japan
Conference Date: 5 November 2006
Page(s): 1 - 5
ISBN (CD): 1-4244-0718-1
ISBN (Paper): 1-4244-0717-6
DOI: 10.1109/MHS.2006.320315
Regular:

In this paper, a novel design of metal-oxide NO2 gas sensor integrated with micro heaters is presented. This gas sensor is ultra small, with the size of 500mumtimes500mum. It has low... View More

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