IEEE - Institute of Electrical and Electronics Engineers, Inc. - Lithographic Data Generation Algorithm based on Micromirror Cell Decomposition

2006 SICE-ICASE International Joint Conference

Author(s): Younghun Jin ; Kiwon Park ; Haeryung Kim ; Manseung Seo
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Busan, South Korea
Conference Date: 18 October 2006
Page(s): 2,179 - 2,183
ISBN (CD): 89-950038-5-5
ISBN (Paper): 89-950038-4-7
DOI: 10.1109/SICE.2006.315722
Regular:

In maskless lithography, micromirrors in an array work like a mask to write patterns directly onto substrates. We focus our attention on lithographic data generation for digital micromirror device... View More

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