IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study on Contact Microforce Measurement Based on Piezoelectric PZT Thin Film

Sixth World Congress on Intelligent Control and Automation

Author(s): Xiaoguang Lu ; Weijie Dong ; Jing Wang ; Mengwei Liu ; Yan Cui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Dalian, China
Conference Date: 21 June 2006
Volume: 2
Page(s): 8,407 - 8,411
ISBN (Paper): 1-4244-0332-4
DOI: 10.1109/WCICA.2006.1713617
Regular:

PZT thin film sensors are widely used in microsensor because of its simple structure, high sensitivity and good linearity. The sol-gel method is used for the PZT thin film deposition on the... View More

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