IEEE - Institute of Electrical and Electronics Engineers, Inc. - Precision Positioning Control of Single-Axis Ultrasonic Actuating Stage by Using Neuro-Fuzzy Control Law

Sixth World Congress on Intelligent Control and Automation

Author(s): ShannChyi Mou
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Dalian, China
Conference Date: 21 June 2006
Volume: 2
Page(s): 8,388 - 8,392
ISBN (Paper): 1-4244-0332-4
DOI: 10.1109/WCICA.2006.1713613
Regular:

A novel single-axis ultrasonic actuating stage was designed. The stable and precise positioning control of a stage was achieved by using neuro-fuzzy controller. It consists of movable plate,... View More

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