IEEE - Institute of Electrical and Electronics Engineers, Inc. - A 4.5mW Closed-Loop /spl Delta//spl Sigma/ Micro-Gravity CMOS-SOI Accelerometer

2006 IEEE International Solid-State Circuits Conference. Digest of Technical Papers

Author(s): Babak Vakili Amini ; Reza Abdolvand ; Farrokh Ayazi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: San Francisco, CA, USA
Conference Date: 6 February 2006
Page Count: 10
Page(s): 1,101 - 1,110
ISBN (Paper): 1-4244-0079-1
ISSN (Paper): 0193-6530
DOI: 10.1109/ISSCC.2006.1696155
Regular:

A force-rebalanced high-order DeltaSigma micro-g accelerometer has been implemented in CMOS-SOI. The measured acceleration resolution is 4mug/radicHz, which is equivalent to a capacitive... View More

Advertisement