IEEE - Institute of Electrical and Electronics Engineers, Inc. - Multivariate Modeling of Heterogeneous Geometrical Surfaces in the Technological Cycle of Manufacturing Silicon Matrixes

2006 International Workshop and Tutorials on Electron Devices and Materials. 7th Annual

Author(s): G.V. Perov ; A.A. Shauerman
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2006
Conference Location: Erlagol, Altai, Russia
Conference Date: 1 July 2006
Page(s): 30 - 31
ISBN (Paper): 5-7782-0646-1
ISSN (Paper): 1815-3712
DOI: 10.1109/SIBEDM.2006.231997
Regular:

A one-dimensional development model of a non-uniform semiconductor surface with adjusted horizontal type of doping is elaborated during thermal oxidation. The model is adapted to structures -... View More

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