IEEE - Institute of Electrical and Electronics Engineers, Inc. - Creation of the Database for Preliminary Calibration System

2006 International Workshop and Tutorials on Electron Devices and Materials. 7th Annual

Author(s): A.S. Korolyova ; E.S. Pjankov
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2006
Conference Location: Erlagol, Altai, Russia
Conference Date: 1 July 2006
Page(s): 326
ISBN (Paper): 5-7782-0646-1
ISSN (Paper): 1815-3712
DOI: 10.1109/SIBEDM.2006.231664
Regular:

Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered... View More

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