IEEE - Institute of Electrical and Electronics Engineers, Inc. - Monte Carlo Simulation of As2 Adsorption on GaAs Surface

2006 International Workshop and Tutorials on Electron Devices and Materials. 7th Annual

Author(s): Alla G. Nastovjak ; Nataliya L. Shwartz ; Zoya Sh. Yanovitskaja ; Alexey V. Zverev
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2006
Conference Location: Erlagol, Altai, Russia
Conference Date: 1 July 2006
Page(s): 58 - 63
ISBN (Paper): 5-7782-0646-1
ISSN (Paper): 1815-3712
DOI: 10.1109/SIBEDM.2006.230307
Regular:

Investigation of As2 adsorption on(111) and (001) GaAs srfaces was carried out using Monte Carlo simulation. The program package SilSim3D-7Comp taking into account chemical reactions on the... View More

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