IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and modeling of a high-speed scanner for atomic force microscopy

2006 American Control Conference

Author(s): G. Schitter ; K.J. Astrom ; B. DeMartini ; G.E. Fantner ; K. Turner ; P.J. Thurner ; P.K. Hansma
Sponsor(s): American Automatic Control Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Minneapolis, MN, USA
Conference Date: 14 June 2006
Page Count: 6
ISBN (Paper): 1-4244-0209-3
ISBN (Online): 1-4244-0210-7
DOI: 10.1109/ACC.2006.1655406
Regular:

A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The... View More

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