IEEE - Institute of Electrical and Electronics Engineers, Inc. - A New Approach for Feedback Control of Radius and Growth Rate in Czochralski (Cz) Processes Exemplarily Studied on LEC-InP

2006 International Conference on Indium Phosphide and Related Materials Conference Proceedings

Author(s): M. Neubert ; J. Winkler ; J. Rudolph
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Princeton, NJ, USA
Conference Date: 8 May 2006
Page Count: 1
Page(s): 144
ISBN (Paper): 0-7803-9558-1
DOI: 10.1109/ICIPRM.2006.1634132
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