IEEE - Institute of Electrical and Electronics Engineers, Inc. - A solenoid-type inductor with Fe-based soft magnetic thin film for high frequency application

The 12th Biennial IEEE Conference on Electromagnetic Field Computation Digest Book

Author(s): Xiao-Yu Gao ; Wen Ding ; Yong Zhou ; Chong Lei ; Ying Cao ; Hyung Choi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Miami, FL, USA
Conference Date: 30 April 2006
Page Count: 1
Page(s): 74
ISBN (Paper): 1-4244-0320-0
DOI: 10.1109/CEFC-06.2006.1632866
Regular:

Soft FeSiBCuNbCr magnetic thin film was deposited by magnetron sputtering as magnetic core for inductor. In the fabrication process, UV-LIGA, dry etching technique, fine polishing and... View More

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