IEEE - Institute of Electrical and Electronics Engineers, Inc. - Structure Analysis of ZnS-SiO2 Thin Film and Patterning by Heat-Mode Lithography

2006 Optical Data Storage Topical Meeting

Author(s): H. Miura ; N. Iwata ; N. Toyoshima ; Y. Hayashi ; K. Takeuchi ; T. Mori ; I. Hirosawa
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Montreal, Que., Canada
Conference Date: 23 April 2006
Page Count: 3
Page(s): 129 - 131
ISBN (Paper): 0-7803-9494-1
DOI: 10.1109/ODS.2006.1632741
Regular:

A tetrahedral network structure like ZnS crystal is found to exist in the amorphous ZnS-SiO2 thin film. It is considered that the etching selectivity in as-deposited and annealed... View More

Advertisement