IEEE - Institute of Electrical and Electronics Engineers, Inc. - The case for near real-time production scheduling in a highly automated semiconductor manufacturing environment

2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Author(s): N. Govind ; B. lyer
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Munich, Germany
Conference Date: 11 April 2005
Page Count: 6
Page(s): 107 - 112
ISBN (Paper): 0-7803-8997-2
DOI: 10.1109/ASMC.2005.1438776
Regular:

The problem of scheduling wafer lots on tools in the semiconductor fabrication facility is considered. We look at the role of scheduling in the organization and identify some of the major factors... View More

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