IEEE - Institute of Electrical and Electronics Engineers, Inc. - Single wafer management systems and bare wafer storage as key to increased yield and productivity

2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Author(s): H. Ritzmann
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Munich, Germany
Conference Date: 11 April 2005
Page Count: 5
Page(s): 90 - 94
ISBN (Paper): 0-7803-8997-2
DOI: 10.1109/ASMC.2005.1438773
Regular:

The semiconductor industry is the most innovative large-scale industry with respect to level of process technology used and product innovation cycle time. On the other hand, there is still a lot... View More

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