IEEE - Institute of Electrical and Electronics Engineers, Inc. - Interface a prototyping experiences paving the way to e-manufacturing

2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Author(s): H. Wohlwend ; S. Fulton
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Munich, Germany
Conference Date: 11 April 2005
Page Count: 4
Page(s): 86 - 89
ISBN (Paper): 0-7803-8997-2
DOI: 10.1109/ASMC.2005.1438772
Regular:

Pressure to increase semiconductor manufacturing productivity remains intense. Because productivity gains resulting from larger wafers, smaller device features, and 90% and greater yields are now... View More

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