IEEE - Institute of Electrical and Electronics Engineers, Inc. - Next generation manufacturing execution system (mes) enabling fully integrated fab automation in 300mm technology development and manufacturing

2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Author(s): C. Mouli
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Munich, Germany
Conference Date: 11 April 2005
Page Count: 9
Page(s): 77 - 85
ISBN (Paper): 0-7803-8997-2
DOI: 10.1109/ASMC.2005.1438771
Regular:

After a three year development and integration effort, Intel has successfully implemented a next generation MES system (referred to as MES300 henceforth this paper) in its state-of-the-art... View More

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