IEEE - Institute of Electrical and Electronics Engineers, Inc. - 2004 - the year of 90-nm: a review of 90 nm devices

2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Author(s): D. James
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Munich, Germany
Conference Date: 11 April 2005
Page Count: 5
Page(s): 72 - 76
ISBN (Paper): 0-7803-8997-2
DOI: 10.1109/ASMC.2005.1438770
Regular:

The year 2004 saw the introduction of the first 90-nm process node devices into the marketplace. This node is notable not only for the expected reduction in feature sizes, but also for the more... View More

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