IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effective wafer inspection strategy for memory manufacturing foundries with inspiring HARI results

2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Author(s): L. Lin ; S. Chen ; T. Han ; Y.H. Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Munich, Germany
Conference Date: 11 April 2005
Page(s): 38 - 42
ISBN (Paper): 0-7803-8997-2
ISSN (Electronic): 2376-6697
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.2005.1438764
Regular:

Yield monitoring has been and always will be one of the most important technologies in memory manufacturing foundries. The monitoring scheme is becoming drastically complicated. As the design rule... View More

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