IEEE - Institute of Electrical and Electronics Engineers, Inc. - Towards nanometer resolution for space charge distribution measurements

12th International Symposium on Electrets

Author(s): G. Dagher ; S. Hole ; J. Lewiner
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Salvador, Brazil
Conference Date: 11 September 2005
Page(s): 204 - 207
ISBN (Paper): 0-7803-9116-0
DOI: 10.1109/ISE.2005.1612356
Regular:

The continuous reduction in size of devices, such as integrated circuits or micro-electro-mechanical systems (MEMS), results in the need to control with better and better resolution the... View More

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