IEEE - Institute of Electrical and Electronics Engineers, Inc. - Application of test structures for monitoring of high frequency characteristics of silicon up to 60 GHz

2005 European Microwave Conference

Author(s): F. Salhi ; W. Riedl ; W. John ; H. Reichl
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Paris, France
Conference Date: 4 October 2005
Volume: 2
Page Count: 4
ISBN (Paper): 2-9600551-2-8
DOI: 10.1109/EUMC.2005.1610143
Regular:

This paper summarises test structures for continuous determination of electrical properties of material. On the basis of onchip technology a silicon wafer with a resistivity (/spl rho/) of 500... View More

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