IEEE - Institute of Electrical and Electronics Engineers, Inc. - Two differential open resonator techniques for measuring dielectric constants of thin films on substrates

2005 European Microwave Conference

Author(s): S.N. Dudorov ; D.V. Lioubtchenko ; J.A. Mallat ; A.V. Raisanen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Paris, France
Conference Date: 4 October 2005
Volume: 1
Page Count: 4
ISBN (Paper): 2-9600551-2-8
DOI: 10.1109/EUMC.2005.1608869
Regular:

In this work we describe two methods developed for measuring dielectric constants of thin films deposited on a substrate. The samples are placed into the classical open Fabry-Perot resonator, and... View More

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