IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of various shaped 5 GHz TFBARs based on 3D full-wave modeling

2005 13th European Gallium Arsenide and other Compound Semiconductors Application Symposium

Author(s): Yong-Dae Kim ; Kook-Hyun Sunwoo ; Sung-Hoon Choa ; Duck-Hwan Kim ; In-Sang Song ; Jong-Gwan Yook
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Paris, France
Conference Date: 3 October 2005
Page Count: 4
Page(s): 697 - 700
ISBN (Paper): 88-902012-0-7
DOI: 10.1109/EUMC.2005.1610271
Regular:

In this paper, three dimensional finite element method is used for the analysis of thin film bulk acoustic wave resonator (TFBAR) at 5 GHz. The TFBAR is placed on thin membrane after removal of... View More

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