IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of low-temperature ultrananocrystalline diamond RF MEMS resonators

2005 13th European Gallium Arsenide and other Compound Semiconductors Application Symposium

Author(s): S.P. Pacheco ; P. Zurcher ; S.R. Young ; D. Weston ; W.J. Dauksher ; O. Auciello ; J.A. Carlisle ; N. Kane ; J.P. Birrell
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Paris, France
Conference Date: 3 October 2005
Page Count: 4
ISBN (Paper): 88-902012-0-7
DOI: 10.1109/EUMC.2005.1610241
Regular:

For the first time working MEMS resonators have been produced using low-temperature deposited (550degC) ultrananocrystallinetrade diamond (UNCDtrade) films. Using a lumped-element model to... View More

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