IEEE - Institute of Electrical and Electronics Engineers, Inc. - IC compatible MEMS technology

2005 13th European Gallium Arsenide and other Compound Semiconductors Application Symposium

Author(s): K. Grenier ; L. Mazenq ; D. Dubuc ; F. Bouchriha ; F. Coccetti ; E. Ojefors ; P. Eindberg ; A. Rydberg ; J. Berntgen ; W.J. Rabe ; E. Sonmez ; P. Abele ; H. Schumacher ; R. Plana
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Paris, France
Conference Date: 3 October 2005
Page Count: 4
Page(s): 293 - 296
ISBN (Paper): 88-902012-0-7
Regular:

This paper deals with an integrated circuits (ICs) compatible MEMS technology, which is used to elaborate an ultra compact RF communication module centered at 24 GHz. This technology uses... View More

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