IEEE - Institute of Electrical and Electronics Engineers, Inc. - Intra-IC Inspection and Metrology with Picosecond Laser Ultrasonics

Proceedings of the IEEE Instrumentation and Measurement Technology Conference

Author(s): G. Andriamonje ; V. Pouget ; Y. Ousten ; D. Lewis ; P. Fouillat ; Y. Danto
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Ottawa, Ont., Canada
Conference Date: 16 May 2005
Volume: 3
Page(s): 2,242 - 2,246
ISBN (Paper): 0-7803-8879-8
DOI: 10.1109/IMTC.2005.1604575
Regular:

This paper presents the application of picosecond laser ultrasonics for integrated circuit inspection and failure analysis. The technique is described and illustrated with several results. The... View More

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