IEEE - Institute of Electrical and Electronics Engineers, Inc. - Broadband Permittivity Measurements of High Dielectric Constant Films

Proceedings of the IEEE Instrumentation and Measurement Technology Conference

Author(s): J. Obrzut ; A. Anopchenko ; R. Nozaki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Ottawa, Ont., Canada
Conference Date: 16 May 2005
Volume: 2
Page(s): 1,350 - 1,353
ISBN (Paper): 0-7803-8879-8
DOI: 10.1109/IMTC.2005.1604368
Regular:

Our investigation concerns measuring broadband dielectric permittivity and loss tangent of thin film high dielectric constant dielectric materials at microwave frequencies. The measurements are... View More

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