IEEE - Institute of Electrical and Electronics Engineers, Inc. - Closed loop optimal control enabled micro-force sensors

2005 IEEE Sensors

Author(s): Yantao Shen ; E. Winder ; Ning Xi ; C.A. Pomeroy
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Irvine, CA, USA
Conference Date: 30 October 2005
Page Count: 6
ISBN (Paper): 0-7803-9056-3
DOI: 10.1109/ICSENS.2005.1597943
Regular:

This paper presents a closed loop optimal control enabled force sensing technology in micromanipulation and microassembly. The developed micro-force sensor is based on a cantilevered beam... View More

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