IEEE - Institute of Electrical and Electronics Engineers, Inc. - Cantilever sensor with stress-concentrating piezoresistor design

2005 IEEE Sensors

Author(s): K. Naeli ; O. Brand
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Irvine, CA, USA
Conference Date: 30 October 2005
ISBN (Paper): 0-7803-9056-3
ISSN (Paper): 1930-0395
DOI: 10.1109/ICSENS.2005.1597768
Regular:

A novel approach for enhancing the sensitivity of piezoresistive cantilever sensors is presented. Thin piezoresistive clamped-clamped silicon beams are released on the surface of the cantilever by... View More

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