IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and characterization of high-sensitivity cantilevers

2005 IEEE Sensors

Author(s): Xiaomei Yu ; Haitao Zhang ; Xiuhan Li ; Ting Li ; Dacheng Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Irvine, CA, USA
Conference Date: 30 October 2005
Page Count: 4
ISBN (Paper): 0-7803-9056-3
DOI: 10.1109/ICSENS.2005.1597767
Regular:

In order to increase the sensitivity of a cantilever-based biosensor, piezoresistive cantilevers with stress concentration holes were designed and fabricated. Firstly the stress distributions and... View More

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