IEEE - Institute of Electrical and Electronics Engineers, Inc. - Pressure-dependent damping characteristics of microsilicon beam resonators for different resonant modes

2005 IEEE Sensors

Author(s): Weibin Zhang ; K.L. Turner
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Irvine, CA, USA
Conference Date: 30 October 2005
Page Count: 4
ISBN (Paper): 0-7803-9056-3
DOI: 10.1109/ICSENS.2005.1597710
Regular:

This paper is to investigate (experimentally and model-based) the resonant-mode dependence of microcantilevers' damping characteristics and how this dependence changes for different pressure... View More

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