IEEE - Institute of Electrical and Electronics Engineers, Inc. - Carrier recombination mechanism at SiO/sub 2//Si interface studied by a photo-thermal and a surface photo-voltage spectroscopy

2005 International Semiconductor Device Research Symposium

Author(s): T. Saisho ; K. Sakai ; H. Hayashi ; S. Sato ; A. Fukuyama ; M. Suemitsu ; T. Ikari
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Bethesda, MD, USA
Conference Date: 7 December 2005
Page Count: 2
Page(s): 414 - 415
ISBN (Paper): 1-4244-0083-X
DOI: 10.1109/ISDRS.2005.1596162
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