IEEE - Institute of Electrical and Electronics Engineers, Inc. - The Effects of Implanting Al and Al and C at Different Temperatures in Different Concentrations into SiC

2005 International Semiconductor Device Research Symposium

Author(s): D. Stepp ; K.A. Jones ; T.S. Zheleva ; M.A. Derenge ; R.D. Vispute ; S. Hullavarad ; S. Dar
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Bethesda, MD, USA
Conference Date: 7 December 2005
Page Count: 2
Page(s): 298 - 299
ISBN (Paper): 1-4244-0083-X
DOI: 10.1109/ISDRS.2005.1596103
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