IEEE - Institute of Electrical and Electronics Engineers, Inc. - Controlled Selective Epitaxy for 3-D LSI

2005 International Semiconductor Device Research Symposium

Author(s): X.X. Zhang ; H.S. Cho ; W.X. Xianyu ; H.X. Yin ; T. Noguchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Bethesda, MD, USA
Conference Date: 7 December 2005
Page Count: 2
Page(s): 76 - 77
ISBN (Paper): 1-4244-0083-X
DOI: 10.1109/ISDRS.2005.1595985
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