IEEE - Institute of Electrical and Electronics Engineers, Inc. - On-chip 2-axis optical fiber actuator using gray-scale technology

2005 International Semiconductor Device Research Symposium

Author(s): B. Morgan ; R. Ghodssi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Bethesda, MD, USA
Conference Date: 7 December 2005
Page Count: 2
Page(s): 52 - 53
ISBN (Paper): 1-4244-0083-X
DOI: 10.1109/ISDRS.2005.1595972
Regular:

We report an on-chip method for actuating an optical fiber in 2-axes. Opposing comb-drive actuators with integrated 3-D wedges (fabricated using gray-scale technology (Morgan, 2004)) create a... View More

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