IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of nano-structured optical devices using nanoimprint lithography

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): Ki-Dong Lee
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203832
Regular:

Summary form only given. In this presentation, we demonstrate the fabrication of a wire grid polarizer, a Bragg grating filters, and an optical ring resonator as working examples of NIL applied to... View More

Advertisement