IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of self-organized nanopatterns by angle-controlled ion sputtering

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): D. Sekiba
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 244 - 245
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203829
Regular:

By using ion sputtering, one can simply induce ripple-like nanoscale patterns on various solid surfaces [Navez, 1962]. On single metal crystals, the main parameters, dominating the pattern... View More

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