IEEE - Institute of Electrical and Electronics Engineers, Inc. - Comparison of Young's modulus dependency on beam accelerating voltage between EB- and FIB-CVD pillars

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): S. Okada ; T. Mukawa ; R. Kobayashi ; M. Ishida ; Y. Ochiai ; T. Kaito ; S. Matsui ; Jun-ichi Fujita
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 234 - 235
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203824
Regular:

In this paper, we report our findings that Young's modulus of amorphous carbon nanopillars grown by FIB-CVD decreases with a decreasing ion-beam accelerating voltage, while that of those grown by... View More

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