IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabricaton of PDMS microlens for LIF detection

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): Sewan Park ; Yongwon Jeong ; Jinseok Kim ; Kihwan Choi ; Hyeon Cheol Kim ; Doo Soo Chung ; Kukjin Chun
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 206 - 207
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203810
Regular:

This paper presents PDMS microlens using photoresist reflow and molding method. This fabrication technique is simple and has good property in terms of the microlens. The microlens integrated on... View More

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