IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of nanofloating gate memory with ZnO nanoparticles embedded in polymeric matrix

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): Eun Kyu Kim ; Jae-Hoon Kim ; Dong Uk Lee ; Gun Hong Kim ; Young-Ho Kim
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 180 - 181
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203797
Regular:

In this study, 10nm thick Zn was deposited with onto Si and SiO/sub 2/ wafer substrates. SiO/sub 2/ thickness was 13.5nm. The PAA was spin coated onto Zn film substrate. This PAA is... View More

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