IEEE - Institute of Electrical and Electronics Engineers, Inc. - In situ generation and growth behavior of alpha-Fe nanocrystals by electron beam induced deposition using iron pentacarbonyl

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): W. Zhang ; M. Shimojo ; M. Takeguchi ; R. Che ; K. Furuya
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 164 - 165
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203789
Regular:

In this work, it was found that alpha-Fe nanocrystals were generated and grew around the focused electron beam irradiation points (deposited nanodots) on the substrate at room temperature during... View More

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