IEEE - Institute of Electrical and Electronics Engineers, Inc. - Resistivity measurements of nanorods formed by electron beam-induced deposition

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): M. Shimojo ; M. Takeguchi ; R. Che ; W. Zhang ; M. Tanaka ; K. Mitsuishi ; K. Furuya
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 158 - 159
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203786
Regular:

Insulators and conductors as well as semiconductors are necessary to make an electronic device. The electric properties of nanometer-sized structures or wires produced by EBID are, therefore, of... View More

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