IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effect of low surface tension liquid on pattern collapse analyzed by dynamical meniscus observation

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): A. Kawai ; K. Suzuki
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 70 - 71
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203742
Regular:

It is well known that Laplace force affects strongly to the resist pattern collapse phenomena during pattern development procedure (Tanaka et al., 1993). Recently, it is reported that the pattern... View More

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