IEEE - Institute of Electrical and Electronics Engineers, Inc. - Reticle haze measurement by spectroscopic ellipsometry

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): Young-Hoon Kim ; Sung-Hyuck Kim ; Sung-un Kim ; Jin-Back Park ; Jal-Sun Kyoung ; Il-Sin An ; Hye-Keun Oh
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
Page(s): 38 - 39
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203726
Regular:

This paper introduces the haze measurement method by using the spectroscopic ellipsometry. The quantity of the haze including the roughness of the reticle can be accurately measured by the... View More

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